Hardware2 hOctober 23, 2026, 07:26

AMEC ships first Primo Domingo selective etching system

China's Advanced Micro-Fabrication Equipment (AMEC) has shipped the first unit of its Primo Domingo high-selectivity vapor-phase etching system to a major domestic semiconductor research and manufacturing customer. The tool targets critical gaps in China's advanced 3D chipmaking.

Digitimes

Open source

AMEC shipped the first Primo Domingo system to a domestic customer
The tool performs high-selectivity vapor-phase etching
It targets advanced 3D chipmaking capabilities in China

#AMEC

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