Beyond ASML: China rethinks EUV race with light-source strategy

China is trying to broaden the definition of the extreme ultraviolet (EUV) race, focusing on its own light-source strategy instead of directly competing with ASML. Specific companies and details of the approach were not disclosed.

• China seeks a workaround in the EUV race via light sources
• The strategy broadens the definition of EUV technology
• ASML remains the dominant supplier of EUV scanners