Intel Puts High-NA EUV into Production, but Stitching Still Has Something to Prove

Intel Foundry has moved ASML's High-NA EUV lithography into mass production. However, the challenge of stitching large chips from multiple exposures remains unresolved.

• Intel Foundry brought ASML's High-NA EUV into production
• Stitching large chips from multiple exposures remains unresolved
• Technology enables printing smaller features than standard EUV