China starts mass production of 200kV electron microscope with 0.1nm resolution

Hefei-based CIQTEK has begun mass production of the TEM-F200, a 200-kilovolt transmission electron microscope with 0.25nm point resolution and a 0.1nm resolution limit. The device was unveiled at the 2026 National Conference on Electron Microscopy in Nanjing and targets atomic-scale imaging for semiconductors and advanced materials.

• TEM-F200: 200kV, 0.25nm point resolution, 0.1nm resolution limit
• CIQTEK moves from prototypes to full mass production and delivery
• The microscope supports defect analysis for next-gen chips and materials
• China also launched TEM-F120 and the AI-driven Aeye-1 system in 2026