Russia completes first 130nm-capable lithography tool, 25 years behind modern equipment

Zelenograd Nanotechnology Center (ZNTC) finished the third R&D stage of Russia's first lithography stepper for 200-mm wafers at the 130nm node. The tool is still an engineering prototype and is unlikely to reach commercial chip production before 2029; the program cost about $70 million, with each stepper estimated at $7.3 million.

• ZNTC's stepper handles 200-mm wafers at the 130nm process node
• One stepper costs about $7.3 million, its laser source $600,000
• The Industry and Trade Ministry allocated roughly $70 million for the program
• The prototype was delivered five months late; commercial use is unlikely before 2029