Chinese startup Langdao Silex unveils EUV light source prototype

Shanghai startup Langdao Silex showed a prototype EUV light source system for the first time at the 2026 China International Industry Fair. About 90% of its parts are domestically made, but staff say mass production is still three to five years away.

• The prototype uses the same LPP approach as leading EUV suppliers
• About 90% of the prototype's components are made in China
• FlintNano-LPP delivers over 15W of EUV at above 2% conversion efficiency
• Production EUV scanners require source power in the hundreds of watts