Gigaphoton debuts neon recycling system with claimed 50% recovery rate

Japanese lithography tool maker Gigaphoton has developed the hTGM neon recycling system for its argon fluoride (ArF) excimer lasers, claiming a 50% recovery rate. A single unit can cut neon consumption by up to 470 kilotons per year, easing reliance on supply chains disrupted since 2022.

• hTGM recovers 50% of neon in ArF lasers used for DUV lithography
• One unit can save up to 470 kilotons of neon per year
• Ukraine supplied up to 50% of semiconductor neon before 2022
• Kanken Techno has already shown a system with over 90% efficiency