China Starts Mass Production of Immersion DUV Lithography Machines

China has begun mass production of immersion DUV lithography machines through state-owned Shanghai Aishengna Electronic Technology Group. Plans call for 5 machines in 2026 and 20 by 2027, reducing reliance on ASML, which holds 90% of the lithography equipment market.

• China began mass production of immersion DUV lithography machines
• Plans: 5 machines in 2026 and 20 by 2027
• ASML controls 90% of the global lithography market
• China has already built an EUV lithography prototype